Quartz rate sensors

This system is usually integrated on a silicon chip. It has two mass-balanced quartz tuning forks, arranged "handle-to-handle" so forces cancel. Aluminum electrodes evaporated onto the forks and the underlying chip both drive and sense the motion. The system is both manufacturable and inexpensive. Since quartz is dimensionally stable, the system can be accurate.

As the forks are twisted about the axis of the handle, the vibration of the tines tends to continue in the same plane of motion. This motion has to be resisted by electrostatic forces from the electrodes under the tines. By measuring the difference in capacitance between the two tines of a fork, the system can determine the rate of angular motion.

Current state of the art non-military technology (2005) can build small solid state sensors that can measure human body movements. These devices have no moving parts, and weigh about 50 grams.

Solid state devices using the same physical principles are used to stabilize images taken with small cameras or camcorders. These can be extremely small (≈5 mm) and are built with MEMS (Microelectromechanical Systems) technologies.